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IMPROVED ADHESION NOBLE METAL THIN LAYER DEPOSIT METHOD |
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Principal investigator : Jean-François Bardeau
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CONTEXT
Most of the currently available methods
used for thin film metal deposition lead to high roughness surface usually
superior to 10nm and weak adhesion which gets stronger when the deposit get
thicker. As a consequence of the widely use of metal layer (micro- and
nano-electronic as well as nano- and bio-technology), there is a demand
nowadays for methods leading to metal layer having thin thickness, relative low
roughness, inferior to 2 nm and improved adhesion.
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