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ACTIVE OPTOELECTRONIC MOEMS DEVICE WITH INTEGRATED WAVELENGTH FILTERING AND TUNABILITY. |
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Principal Investigator: M. GARRIGUES
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TECHNICAL DESCRIPTION
This invention describes a new concept of tunable active Micro-Opto-Electro-Mechanical-System (MOEMS) microdevice for specific applications such as near infrared spectroscopy or optical telecommunications. The proposed optical structure can be used for the realization of tunable wavelength selective devices (photodetectors or emitters). The device uses a radically new optical design that separates the detector (or emitter) from the filter but places it on top of the filter.
Compared to existing micro-mechanical tunable devices, this concept presents two main advantages including the improvement of the optical spectral response and relaxation of the technological constraints for fabrication.
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