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BIOSENSOR MATRIX AND METHOD FOR MAKING SAME |
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Principal Investigator : CHRISTIAN BERGAUD
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TECHNICAL DESCRIPTION
. It has a planar main surface and cavities, arranged from the surface opposite said planar surface, defining between the base of said cavities and the main planar surface deformable structures which include at least a piezoresistive or piezoelectric element. The method for making such a matrix uses manufacturing techniques adapted to microtechnologies and nanotechnologies, preferably with a localized pre-amorphisation of the surface of the substrate prior to implantation of the piezoresistive elements, which is followed by annealing.
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