|
DEVICE FOR GENERATING AN ION BEAM |
|
Principal Investigator: J. GIERAK
|
TECHNICAL DESCRIPTION
This invention describes a device for generating an ion beam. The inventive device includes an ion source, a means to extract ions emitted by said source, a means to accelerate extracted ions, a means to select accelerated ions and an electrostatic optical system to focus the selected ions along a first axis. This device also includes a means to vary the distance between the ion source and the means of, the distance is included along a second axis which is parallel to the first axis and which constitutes the axis of the beam of ions emitted by the source. The invention is particularly suitable for the production of nano-structures.
To read more, please register or connect in the right pannel... |
