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FLUIDIZED BED REACTOR FOR THE PRODUCTION OF VAPORS OF SUBLIMED MOLECULAR AND INORGANIC |
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Principal Investigator : Constantin VAHLAS
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CONTEXT
The invention describes a setup for the production of vapors
of a solid molecular or inorganic compound. The setup includes an instrumented
fluidized bed (FB) reactor, heated to a temperature which is appropriate for
the sublimation of the precursor. The FB is made of either pure precursor
powder or a mixture of the precursor and inert powders. The vapors can be used
to feed a surface treatment apparatus for thin film deposition or powder
manufacturing. The apparatus can be a chemical vapor deposition (CVD) reactor.
This
relatively simple and robust technology provides high, constant, and
reproducible flux of the precursors. There are major advantages over classical
sublimators such as fixed beds which achieve neither complete nor constant
saturation of the carrier gas flowing over or through the thermoregulated
particle bed.
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