TECHNICAL DESCRIPTION 

The object of the present invention is to provide an electrolytic material that has an improved ionic conductivity compared with materials of the prior art, and/or that can be prepared from stable targets suitable for industrial scale manufacture.

Accordingly, this invention relates to a material (lithium ion conducting) for uses as electrolyte in microbatteries. Electrolytic material comprises an amorphous compound having the atomic composition LixSMwOyNz with x= (similar) 0.5 to (similar) 3; y= (similar) 1 to (similar) 6; z=0.1-1; w=less than 0.3; and M= B, Ge, Si, P, As, Cl, Br, and/or I.

This material can be prepared in the form of a thin film deposited on a substrate, by radiofrequency magnetron sputtering, deposition being carried out under the following conditions:

- the plasma used for cathode sputtering is a gas consisting of nitrogen and optionally oxygen and/or argon, the minimum nitrogen content being 30 at %

- the target used for cathode sputtering is a target consisting of at least 80 at % Li2SO4 in the crystallized form;

- the substrate used for deposition may consist of aluminum, silicon, carbon, stainless steel, a positive electrode material (in particular TiS2 or LiCoO2), a negative electrode material (in particular metallic lithium or a lithium alloy).